picture of a novascan uv ozone cleaner with lid open showing uv lamp

Novascan UV Ozone Cleaning Systems: High Performance Surface Treatment and Cleaning for Research & Industry

Elevate your treatment process & results. Atomically clean hydrophilic surfaces with Novascan's high-performance UV Ozone Cleaners. Ideal for semiconductor wafers, PDMS, glass, AFM probes, and more. Eliminate contaminants and improve surface quality.

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Novascan's UV Ozone Cleaners are a cutting-edge solution designed to deliver superior surface cleaning and treatments for a wide range of applications. Our advanced technology utilizes deep ultraviolet (UV) light and ozone to effectively remove contaminants without damaging delicate surfaces.

Key Benefits

  • Atomic-level cleaning: Achieve unparalleled surface cleanliness improved repeatable results.

  • Non-destructive surface treatment process: A safe and gentle dry treatment process without harsh chemical etching.

  • Versatility: Clean a variety of surfaces and materials such as borosilicate, gallium arsenide, ITO, silicon wafers, glass, PDMS, AFM probes, polymers and more.

  • Efficiency: A low cost yet fast and efficient cleaning process that saves time and resources.

Applications

  • Semiconductor Manufacturing: Atomically clean wafers for optimal results.

  • Atomic Force Microscopy & Quartz Crystal Balance Applications: Prepare samples, AFM probes and QCM Sensors for precise imaging, chemical detection and analysis.

  • Glassware Cleaning: Achieve hydrophilic, sterile, pristine surfaces for cell culture, microscopy, and other applications.

  • Surface Modification & Preparation: Enhance adhesion and bonding, wettability, and other surface properties.

  • Microfluidic Devices: Clean and prepare PDMS and glass components for microfluidic fabrication and bonding.

  • Photoresist Removal: Thermal UV treatment process that allows for effective stripping of photoresist residues.

  • Organic Contaminant Removal: Sublimate organic contaminants for surfaces cleaned to the molecular level.

Product Features

Novascan PSD, PSDP, and PSDP-Thermal Series: Novascan three unique models will meet your specific needs and budgetary requirements.

  • Powerful Deep UV light: Novascan systems use lamps with the highest quality of deep UV quartz that is closely spaced for maximum uniformity to enhance cleaning performance for challenging materials. 

  • Customizable Systems: Tailor your cleaner to your specific requirements with Novascan's host of UV system options. Systems are designed to be upgradable in the future, so that your system can grow with your projects.

  • Multiple Sized Systems: Sizes range from 100x100mm (4x4inches) up to 500x500mm (20x20inches) to match your sample sizes and the number of samples that you want to treat at a time.

  • Fixed or Variable Height Systems: Choose fixed height for wafers, microscope slides, coverslips, AFM probes, etc. Variable Height sample stages available for taller samples up to 4" in height, or up to 3.5" in height for UV Thermal systems.

  • Reliability:  Highly reliable systems that have been proven for over 25 years.

Contact Novascan today. We are always happy to help. Our team is ready to assist you in selecting the right UV Ozone Cleaner for your application.

Novascan UV Ozone Cleaner: Case Studies

Case Study 1

"New" glass slide and coverslip surfaces are typically not atomically clean right out of the box. These surfaces may be covered by hydrophobic contaminants. With Novascan UV Ozone Cleaners, surfaces can easily and quickly be cleaned to the atomic level with just room air, leaving surfaces pristine and hydrophilic.

Contact Angle Image of a water droplet on a borosilicate glass coverslip showing the hydrophobic nature of the surface prior to treatment with a Novascan UV Ozone Cleaner. Similar result are observed with silicon, silicon dioxide and other materials.

Higher than desired contact angle caused by organic contaminants.

Contact Angle Image of water droplet on a borosilicate glass coverslip showing surface wettability changes to hydrophilic after treatment with a Novascan UV Ozone Cleaner. Similar result are observed with silicon, silicon dioxide and other materials.

After Novascan UV Ozone system treatment, glass coverslip surface is returned to its natural, hydrophilic state after contaminants are quickly stripped.

Case Study 2

AFM study of contaminated glass slide surfaces before and after atomic cleaning with a Novascan UV Ozone Cleaner (Note that the data is autoscaled in the last AFM image to reveal the glass grain)

Before treatment with the Novascan UV Ozone system, this AFM sample optically looks clean but it is actually covered with microscopic contaminants.

After treatment with a Novascan UV system, the surface has been cleaned & stripped of contaminants, revealing the natural topography of a clean glass surface.

Technical Specifications: Novascan’s UV Ozone Cleaning Products

A host of valuable options are available for the PSD, PSDP and PSDP-UVT to match all of your application needs. Please view features and options for each product series below.


The PSD Series

The PSD Series instruments (PSD-UV) are digitally controlled benchtop systems that are available in sizes ranging from 4x4” to 20x20”. These systems feature a powerful UV grid system with reflector and adjustable height stage for optimal sample positioning and performance. In/Out Gas Ports are available on the 4x4” and larger systems. The system is controlled by a convenient preset controller that makes operation a breeze.

Features

  • Preset Digital Controller

  • Convenient 2 button operation is convenient and simple.

  • Automated 15, 30, 45, 60, 90, 120 minute process time

  • Process cycle can be manually interrupted at any time

  • System cannot be easily upgraded with a temperature stage

  • Cost saving yet functional design makes this system a popular choice

  • Very simple setup and use


The PSD Pro Series

The PSD Pro Series (PSDP-UV) instruments are research grade UV/ozone cleaning systems that offer maximum versatility for molecular organic stripping and numerous other applications. Operate in ambient air or flow oxygen through one of two standard gas ports for increased ozone production. A programmable digital controller handles the system processing ensuring accurate timing regimes and optimum scouring parameters.

Features

  • Programmable Digital Controller for more operation control

  • Digital Count down display.

  • Easily upgradeable to the temperature controlled system

  • Function “pause” and “interrupt” capability

  • A powerful system that offers enhanced process control

  • Internal Memory for previous settings


The PSD Pro Heated Series

The PSD Pro Heated Series (PSDP-UVT) takes the power of the Pro Series to a new level with the addition of a temperature controlled stage designed to maximize the destruction of molecular organic materials. A digital controller with PID feedback loop accurately maintains stable temperatures of up to 150 degrees Celsius. (200C available as an option.)

Features

  • Identical to the PSDP, but factory installed with the temperature stage.

  • Offers maximum potential and flexibility

  • Ideal for multiple user environment


Common System Features and Information

UV Grid Lamp: Deep UV ozone producing Mercury vapor grid lamp with reflector. Half life approximately 5000 hours. Sparing no expense Novascan Lamps are crafted with the highest quality, closely spaced quartz tubing for highest transmission and most uniform coverage.

Electronics: Novascan UV Systems are designed for long term reliability with many of our UV Ozone systems still fully operational after 10 or more years. We use higher quality component such as ultra powerful and reliable linear power supplies instead of cheap switching power supplies. While more costly to produce, Novascan believes that for reliability and safety it is important to use NTRL rated digital controllers, relays, power inlets and other components. All systems are assembled in the USA.

Modular Upgradable Designs: At Novascan our mission is to build systems that support our clients changing application and laboratory needs. As such our designs are highly modular allowing future upgradability to different lamp sizes, the addition of options and design updates.

Support: All Novascan systems backed by Novascan’s unparalleled support system of Masters and PhD level scientists and technicians.

Thermal UV Systems: Enhanced and faster treatment for resist stripping, polymer bonding, etc. up to 200C (300C Optionally)

Dual UV Systems: Optional Top and Bottom lamps for simultaneous treatment of both sides of the sample.

Ozone Evacuator Option: Ozone Neutralizer/Killer with PTFE Vacuum Pumpin g system for removal of residual Ozone after the UV treatment cycle has completed. This device allows you to safely operate a UV Ozone system on a benchtop instead of in a chemical fume hood. An Automated Ozone Evacuation also available.

Power: 100, 120, 220, 240 VAC, 50-60 cycle

Safety: Safety interlock turns off UV lamps when chamber is opened.

Sample Height: All systems have an adjustable height stage with an external stage lock for proper sample spacing from the lamp. Standard stages are the UV grid size or larger.

Gas Ports: Two ports standard, more ports optional

Vacuum Chamber: Optional by special order - Aluminum and Quartz fabrication.

UV Reflector: The UV Reflector is generally 1” larger than the grid size. For example for a 4x4” grid the reflector is 5x5”.

Power: 100, 120, 220, 240 VAC, 50-60 cycle

Sample loading: Chamber hinges up and away from the sample staging area allowing ~360 degree access for loading.

Dual UV: Optional Top and Bottom lamps for simultaneous treatment of both sides of the sample.

PSD and PSDP Model Specifications

(Click grid below to enlarge.)

Contact Novascan today. We are always happy to help. Our team is ready to assist you in selecting the right UV Ozone Cleaner for your application.