Thank you for visiting Novascan’s UV Ozone Cleaner Website
For over 25 years Novascan has been designing UV systems and has provided expertise, sales and support to thousands of clients from around the world. To meet our clients diverse application requirements we offer UV Ozone Surface Cleaning and Surface Activation Systems in many sizes ranging from 100x100mm up to 500x500mm with many different digital controller types and options. Systems are available in Easy to Operate Manual and Automated versions with prices starting at just under $3000 for our smallest PSD model.
To make things simple our highly trained staff members are ready to answer your questions and to help you to select the ideal system for your application. To get started just send us a bit of information on our Request a UV System Quote page.
Also for detailed information please take a look at our UV Ozone Cleaner Brochure or continue reading below for more information and case studies.
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Applications
Strip and Remove Organic Contaminants:
Quickly strip Oily Organic contaminants from a variety of surfaces and materials such as borosilicate, gallium arsenide, ITO, silicon wafers, glass, PDMS, AFM probes, polymers and more.
Semiconductor Wafer Cleaning and Surface Cleaning:
Non-destructively surface clean semiconductor wafers of all types (Silicon wafers, Indium phosphide (InP) wafers, Gallium arsenide (GaAs) wafers, Germanium (Ge) wafers, Sapphire wafers, etc. for optimal results without expensive high vacuum systems or wet processes or toxic chemicals.
Scanning Electron Microscopy, Transmission Electron Microscopy, Atomic Force Microscopy & Quartz Crystal Microbalance Balance Applications:
Prepare and clean SEM / TEM samples, prep and reuse AFM probes and clean QCM Sensors for high resolution imaging, force measurement, chemical detection and analysis.
Glass Surface Cleaning:
Achieve hydrophilic, sterile, pristine surfaces for cell culture, microscopy, AFM, PDMS Microfluidic bonding and other applications.
Surface Modification, Surface Activation & Preparation:
Activates and Enhance adhesion and bonding, wettability, and other surface properties.
Microfluidic Devices:
Clean and prepare PDMS and glass components for microfluidic fabrication and bonding.
Photoresist Stripping:
Use Novascan’s Thermal UV treatment process with pure Oxygen for effective non-destructive stripping of photoresist residues from wafers, silicon, silicon nitride, borosilicate glass and semiconductor surfaces.
Product Advantages
Novascan PSD, PSDP, and PSDP-Thermal Series UV Ozone Surface Cleaning and Surface Activation Systems:
Novascan offers multiple benchtop UV Ozone Cleaner models, system sizes and options to meet your specific needs and budgetary requirements.
Unique sample stages that allow for 360 degree sample access and thin or tall samples:
Novascan systems offer our original Variable Height Stage for setting the treatment critical UV lamp to sample distance. Samples up to 100mm in height can be treated in our Variable Stage Height Systems. Novascan also offers a new cost-efficient Low Sample fixed stage series that allows you to treat thin samples that are less than 15mm in height while still incorporating all of the great features and advantages of our original systems.
Powerful High Density Deep UV Quartz Grid Lamps:
Novascan systems use lamps with the highest quality of deep UV quartz that are closely spaced for maximum coverage uniformity and fast enhanced surfaces cleaning performance for common as well as challenging materials.
Highly Upgradable and Customizable Systems:
Novascan offers a host of UV system options to meet your application requirements now…. and in the Future. Our modular UV system designs allow them to be upgradable so your system can remain capable as your projects evolve and grow. Add options such as Thermal UV for enhanced cleaning applications, larger lamps for larger sample or an Ozone Evacuator so you can use your system safely on benchtop instead in a fume hood.
Multiple Sized Systems to meet your application requirements:
Sizes range from 100x100mm (4x4inches) up to 500x500mm (20x20inches) to match your sample sizes and the number of samples that you want to treat at a time.
Fixed or Variable Height Systems:
Choose fixed height for wafers, microscope slides, coverslips, AFM probes, etc. Variable Height sample stages available for taller samples up to 4" in height, or up to 3.5" in height for UV Thermal systems.
Reliability:
Highly reliable systems that have been proven for over 25 years.
Our experts are always happy to help. Contact Novascan today. We are ready to assist you in selecting the right UV Ozone Cleaning Solution for your application.
Navigate: Overview | Applications | Case Studies | Models & Options | Request a Quote
Technical Specifications: Novascan UV Ozone Cleaning Products
A host of valuable options are available for the PSD, PSDP and PSDP-UVT UV Cleaner models to customize systems to your application needs. Please view features and options for each product series below.
The PSD Series
The PSD Series instruments (PSD-UV) are digitally controlled benchtop systems that are available in sizes ranging from 4x4” to 20x20”. These systems feature a powerful UV grid system with reflector and adjustable height stage for optimal sample positioning and performance. In/Out Gas Ports are available on the 4x4” and larger systems. The system is controlled by a convenient preset controller that makes operation a breeze.
Features
Available in Cost Effective, Low Sample Stage models and our original Variable Stage Height Models
Easy to use Preset Digital Controller
Convenient 2 button operation is convenient and simple.
Automated 15, 30, 45, 60, 90, 120 minute process time
Process cycle can be manually interrupted at any time
System can be upgraded with options like a Thermal UV Temperature Stage, but not as easily or as cost effectively as the PSDP models.
Cost saving yet functional design makes this system a popular choice
Very simple setup and use
The PSD Pro Series
The PSD Pro Series (PSDP-UV) instruments are research grade UV/ozone cleaning systems that offer maximum versatility for molecular organic stripping and numerous other applications. Operate in ambient air or flow oxygen through one of two standard gas ports for increased ozone production. A programmable digital controller handles the system processing ensuring accurate timing regimes and optimum scouring parameters.
Features
Available in Cost Effective, Low Sample Stage models and our original Variable Stage Height Models
Programmable Digital Controller for more operation control
Digital Count down display.
Easily upgradeable to the temperature controlled system
Function “pause” and “interrupt” capability
A powerful system that offers enhanced process control
Internal Memory for previous settings
The PSD Pro Heated Series
The PSD Pro Heated Series (PSDP-UVT) takes the power of the Pro Series to a new level with the addition of a temperature controlled stage designed to maximize the destruction of molecular organic materials. A digital controller with PID feedback loop accurately maintains stable temperatures of up to 200 degrees Celsius. (300C available as an option.)
Features
Available in Cost Effective, Low Sample Stage models and our original Variable Stage Height Models
Identical to the PSDP, but factory installed with the temperature stage.
Offers maximum potential and flexibility
Ideal for multiple user environment
Common System Features and Information
UV Grid Lamp: Deep UV ozone producing Mercury vapor grid lamp with reflector. Half life approximately 5000 hours. Sparing no expense Novascan Lamps are crafted with the highest quality, closely spaced quartz tubing for highest transmission and most uniform coverage.
Electronics: Novascan UV Systems are designed for long term reliability with many of our UV Ozone systems still fully operational after 10 or more years. We use higher quality component such as ultra powerful and reliable linear power supplies instead of cheap switching power supplies. While more costly to produce, Novascan believes that for reliability and safety it is important to use NTRL rated digital controllers, relays, power inlets and other components. All systems are assembled in the USA.
Modular Upgradable Designs: At Novascan our mission is to build systems that support our clients changing application and laboratory needs. As such our designs are highly modular allowing future upgradability to different lamp sizes, the addition of options and design updates.
Support: All Novascan systems backed by Novascan’s unparalleled support system of Masters and PhD level scientists and technicians.
Thermal UV Systems: Enhanced and faster treatment for resist stripping, polymer bonding, etc. up to 200C (300C Optionally)
Dual UV Systems: Optional Top and Bottom lamps for simultaneous treatment of both sides of the sample.
Ozone Evacuator Option: Ozone Neutralizer/Killer with PTFE Vacuum Pumping system for removal of residual Ozone after the UV treatment cycle has completed. This device allows you to safely operate a UV Ozone system on a benchtop instead of in a chemical fume hood. An Automated Ozone Evacuation also available.
Power: 100, 120, 220, 240 VAC, 50-60 cycle
Safety: Safety interlock turns off UV lamps when chamber is opened.
Sample Height: All systems have an adjustable height stage with an external stage lock for proper sample spacing from the lamp. Standard stages are the UV grid size or larger.
Gas Ports: Two ports standard, more ports optional
Vacuum Chamber: Optional by special order - Aluminum and Quartz fabrication.
UV Reflector: The UV Reflector is generally 1” larger than the grid size. For example for a 4x4” grid the reflector is 5x5”.
Power: 100, 120, 220, 240 VAC, 50-60 cycle
Sample loading: Chamber hinges up and away from the sample staging area allowing ~360 degree access for loading.
Dual UV: Optional Top and Bottom lamps for simultaneous treatment of both sides of the sample.
PSD and PSDP Model Specifications
(Click grid below to enlarge.)
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Novascan UV Ozone Cleaner: Case Studies
Case Study 1
"New" glass slide and coverslip surfaces are typically not atomically clean right out of the box. These surfaces may be covered by hydrophobic contaminants. With Novascan UV Ozone Cleaners, surfaces can easily and quickly be cleaned to the atomic level with just room air, leaving surfaces pristine and hydrophilic.
Contact Angle Image of a water droplet on a borosilicate glass coverslip showing the hydrophobic nature of the surface prior to treatment with a Novascan UV Ozone Cleaner. Similar result are observed with silicon, silicon dioxide and other materials.
Contact Angle Image of water droplet on a borosilicate glass coverslip showing surface wettability changes to hydrophilic after treatment with a Novascan UV Ozone Cleaner. Similar result are observed with silicon, silicon dioxide and other materials.
Case Study 2
AFM study of contaminated glass slide surfaces before and after atomic cleaning with a Novascan UV Ozone Cleaner (Note that the data is autoscaled in the last AFM image to reveal the glass grain)
Atomic Force Microscope image of a heavily contaminated glass microscope slide coverslip scanned prior to treatment with a Novascan UV Ozone Cleaner.
Atomic Force Microscope image of a heavily contaminated glass microscope slide coverslip scanned after a 10 minutes treatment with a Novascan UV Ozone Cleaner.
Atomic Force Microscope image of a heavily contaminated glass microscope slide coverslip scanned after a 20 minutes treatment with a Novascan UV Ozone Cleaner.